Product & Services

We provide repair services for the following RF Generator & DC Power Supplies.

Generator Type:
Comdel CPS1001; CX600; CX12500; CLF5000; CDX2000; CLX10K & etc.
RFPP LF5; LF10S; RF10A & etc.
ENI OEM/ GHW/ Quanta Series; DPG10; Nova 50 & etc.
AE RFG/ PDX/ MDX/ APEX Series; HFV8000, Cesar 1312, Ovation & etc.
DAIHEN MFM20SA; DFS5SA & etc.
ADTEC AX-3000-27 & TX/ TS/ AX/ TR Series
AMAT 15V & 24V Power Supply

High Frequency RF Power Supplies

Comdel High Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.

Low Frequency RF Power Supplies

Comdel Low Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.

Dual Frequency RF Generators & Power Supplies

Simplify Operations and Reduce Costs Without Sacrificing Performance

Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements.

ESC-HV Electrostatic Chuck Power Supplies

1-15 kV Models, Industry Standard Interface, designed for volume manufacturing and available with selectable features and flexible packaging option.

XP Comdel’s ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.

Match Pro Impedance Matching Networks

Ultra-Fast Tuning and Fine Tune Resolution Deliver Repeatable Process Results. All Match Pro impedence matching networks are engineered with XP Comdel’s unique PROTRAK, a high-speed tuning algorithm that gradually slows the system as it approaches the tuning point, allowing a precise match even in high “Q” loads. This proportional control circuitry illustrates the critical difference between XP Comdel’s Match Pro and other matching networks.

VF Series Multi Channel Synthesizer Modules

Accommodates up to 16 Channels and a Wide Range of Frequencies.XP Comdel’s VF series multi channel synthesizer modules provide phase adjustable output to avoid destructive arcing and cross-talk in multiple cathode plasma processing chambers.

View RF Generator details here – Comdel RF Power Supplies | DC Generators | Synthesizer

Our Other Value Added Services

Sales of New Equipment.

  •     Wet Process Equipment (Up to 300mm wafer).
  •     Spin Rinse Dryer  (Up to 300mm wafer).
  •     SAT / Spray Acid Tool  (Wet Etching / Wet Clean).
  •     SST / Spray Solvent Tool  (Stripper –  Dry In & Dry Out).
  •     Wafer Sorter / Cassette Transfer System  (Up to 300mm wafer).

Sales of Used Equipment with / without overhauled.

  •    TEL Clean Track System.
  •    DNS Wafer Scrubber System.
  •    Nikon Stepper / Scanner.
  •    Canon Stepper / Scanner.
  •    Other Process Equipment.

Engineering Service.

  •   Overhaul.
  •   Modification.
  •   Relocation.
  •   Installation.

Repair & Maintenance of Dry Pump / Turbo Pump.

  •   Edward Dry Pump.
  •   Ebara Dry Pump.
  •   Varian Turbo Pump.
  •   Leybold / Osaka Turbo Pump.

OEM Parts, Second Source, customized design & modification service.

  •   MOCVD Wafer Tray.
  •   Nikon Stepper Chuck.
  •   Porosity Ceramic Chuck.
  •   Shower Head.
  •   Robot Arm.
  •   Ceramic Rim.
  •   Ceramic Special Parts.
  •   ESD Plastic Cassette. (Up to 300mm).
  •   Metal Cassette. (Up to 300mm).