With our team of expert support engineers provides customized & unmatched onsite repair & support services for XP Comdel’s RF power supplies, DC generators, electrostatic chuck power supplies, multi-channel synthesizers and matching networks.
High Frequency RF Power Supplies
Comdel High Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, ICP, RF sputtering and PECVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
The CB series is the culmination of 45 years of RF plasma and heating experience. We have taken the proven rugged design of the CX series power amplifier section and combined it with all the innovation in DC supplies and diagnostics to make a compact, stable RF power supply without compromising reliability for size. These single frequency RF power supplies operate in the HF band (3.39MHz to 30MHz) still benefiting from XP Comdel’s “S” technology.
Operating at frequencies from 30MHz to 81MHz, the CVB series provides reliable VHF power into plasma and industrial processes. CVB generators use broadband, low-“Q” amplifiers to reduce the possibility of RF system instabilities in your system.
The CX platform has proven to be the benchmark in the semiconductor industry for value and reliability. These high frequency (HF) generators operate at a single frequency from 3.39MHz to 30MHz. A frequency agile option allows fast frequency tuning in a range +/-10% of the center frequency.
The unsurpassed MTBF of the CX series brings the cost of ownership to a very low level. These generators were the first to incorporate XP Comdel’s patented “S” technology in power amplifier design. This design enhances system stability and increases the life of the RF delivery system.
Comdel Low Frequency RF Power Supplies are designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
The CLB series incorporates all of the features and innovations developed in the previous CLF series with the added advantage of lighter weight and smaller size.
The CLX series low frequency RF power supplies are available in power ranges from 600 to 12,000 Watts with fixed frequencies from 20 kHz to 2 MHz. A frequency agile option allows fast frequency timing to some loads. The conservatively rated solid-state design provides low cost of ownership with high reliability.
Dual Frequency RF Generators & Power Supplies
Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements.
ESC-HV Electrostatic Chuck Power Supplies
XP Comdel’s ESC suite of electrostatic chuck power supplies offer the most stable electrical design with the ultimate in package flexibility. These compact, lightweight chuck supplies come complete with built-in RF filters for device protection and unsurpassed clamping for electrostatic wafer processing applications.
Match Pro Impedance Matching Networks
VF Series Multi Channel Synthesizer Modules
XP Comdel’s VF series multi channel synthesizer modules provide phase adjustable output to avoid destructive arcing and cross-talk in multiple cathode plasma processing chambers. The VF series can accommodate up to 16 channels and may be programmed to any frequency between 2 and 60 MHz. Frequency changes are simultaneous and phase continuous. The phase of each channel can be adjusted to an accuracy greater than 0.1 degree resolution. The VF series allows adjustment for cable length dependencies.